Invention Grant
- Patent Title: Pressure control device
- Patent Title (中): 压力控制装置
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Application No.: US13454330Application Date: 2012-04-24
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Publication No.: US09027588B2Publication Date: 2015-05-12
- Inventor: Mari Kusunoki , Takuo Ohashi , Shinji Miyazaki , Norihiko Kamiura
- Applicant: Mari Kusunoki , Takuo Ohashi , Shinji Miyazaki , Norihiko Kamiura
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-102123 20110428; JP2011-218868 20111003
- Main IPC: G05D16/20
- IPC: G05D16/20 ; F16K31/10 ; F16K31/04 ; F16K31/44 ; H01L21/67
Abstract:
A pressure control device according to an embodiment includes a solenoid portion for regulating a gate opening of a valve through a first shaft portion connected to the valve, a micrometer for regulating the gate opening through the first shaft portion and a second shaft portion having an axial direction which is parallel with that of the first shaft portion when the second shaft portion is connected to the first shaft portion, and a switching portion. The switching portion switches to cause the solenoid portion to regulate the gate opening or to cause the micrometer to regulate the gate opening.
Public/Granted literature
- US20120273706A1 PRESSURE CONTROL DEVICE Public/Granted day:2012-11-01
Information query
