Invention Grant
- Patent Title: Polishing composition
- Patent Title (中): 抛光组成
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Application No.: US13878362Application Date: 2011-10-06
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Publication No.: US09028574B2Publication Date: 2015-05-12
- Inventor: Keiji Ashitaka , Hitoshi Morinaga , Akihito Yasui
- Applicant: Keiji Ashitaka , Hitoshi Morinaga , Akihito Yasui
- Applicant Address: JP Kiyosu-Shi
- Assignee: Fujimi Incorporated
- Current Assignee: Fujimi Incorporated
- Current Assignee Address: JP Kiyosu-Shi
- Agency: Foley & Lardner LLP
- Priority: JP2010-229720 20101012; JP2011-079850 20110331
- International Application: PCT/JP2011/073100 WO 20111006
- International Announcement: WO2012/050044 WO 20120419
- Main IPC: C09K3/14
- IPC: C09K3/14 ; C09G1/02 ; H01L21/3105

Abstract:
A polishing composition contains colloidal silica particles having protrusions on the surfaces thereof. The average of values respectively obtained by dividing the height of a protrusion on the surface of each particle belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles by the width of a base portion of the same protrusion is no less than 0.245. Preferably, the part of the colloidal silica particles that has larger particle diameter than the volume average particle diameter of the colloidal silica particles has an average aspect ratio of no less than 1.15. Preferably, the protrusions on the surfaces of particles belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles have an average height of no less than 3.5 nm.
Public/Granted literature
- US20130199106A1 POLISHING COMPOSITION Public/Granted day:2013-08-08
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