Invention Grant
US09028772B2 Methods for forming a channel through a polymer layer using one or more photoresist layers
有权
使用一个或多个光致抗蚀剂层通过聚合物层形成通道的方法
- Patent Title: Methods for forming a channel through a polymer layer using one or more photoresist layers
- Patent Title (中): 使用一个或多个光致抗蚀剂层通过聚合物层形成通道的方法
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Application No.: US13931086Application Date: 2013-06-28
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Publication No.: US09028772B2Publication Date: 2015-05-12
- Inventor: Huanfen Yao , Jeffrey George Linhardt , Babak Parviz
- Applicant: Google Inc.
- Applicant Address: US CA Mountain View
- Assignee: Google Inc.
- Current Assignee: Google Inc.
- Current Assignee Address: US CA Mountain View
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: G01N21/75
- IPC: G01N21/75 ; G03F7/16

Abstract:
A method may involve forming one or more photoresist layers over a sensor located on a structure, such that the sensor is covered by the one or more photoresist layers. The sensor is configured to detect an analyte. The method may involve forming a first polymer layer. Further, the method may involve positioning the structure on the first polymer layer. Still further, the method may involve forming a second polymer layer over the first polymer layer and the structure, such that the structure is fully enclosed by the first polymer layer, the second polymer layer, and the one or more photoresist layers. The method may also involve removing the one or more photoresist layers to form a channel through the second polymer layer, wherein the sensor is configured to receive the analyte via the channel.
Public/Granted literature
- US20150004058A1 Methods for Forming a Channel Through a Polymer Layer Using One or More Photoresist Layers Public/Granted day:2015-01-01
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