Invention Grant
US09029189B2 Bicyclic guanidines, metal complexes thereof and their use in vapor deposition
有权
双环胍，其金属络合物及其在气相沉积中的应用
- Patent Title: Bicyclic guanidines, metal complexes thereof and their use in vapor deposition
- Patent Title (中): 双环胍，其金属络合物及其在气相沉积中的应用
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Application No.: US12918785Application Date: 2009-02-20
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Publication No.: US09029189B2Publication Date: 2015-05-12
- Inventor: Roy Gerald Gordon , Leonard Neil Jacques Rodriguez
- Applicant: Roy Gerald Gordon , Leonard Neil Jacques Rodriguez
- Applicant Address: US MA Cambridge
- Assignee: President and Fellows of Harvard College
- Current Assignee: President and Fellows of Harvard College
- Current Assignee Address: US MA Cambridge
- Agency: Wilmer Cutler Pickering Hale and Dorr LLP
- International Application: PCT/US2009/034708 WO 20090220
- International Announcement: WO2009/105668 WO 20090827
- Main IPC: C07D487/04
- IPC: C07D487/04 ; C07F15/06 ; C07F15/04 ; C07F15/00 ; C07F7/28 ; C07F7/00 ; C23C16/00 ; C23C16/44 ; H01L51/40 ; C23C16/18
Abstract:
Bicyclic guanidine compounds are described. Metal bicyclic guanidinate and its use in vapor deposition processes to deposit a metal-containing thin film are also described. Methods of making alkaline earth metal N,N′dialkylacetamidinates or bicyclic guanidinates including dissolution of alkaline earth metal into liquid ammonia followed by addition of a solution of an amidine or guanidine ligand in the free base from are provided.
Public/Granted literature
- US20110151615A1 BICYCLIC GUANIDINES, METAL COMPLEXES THEREOF AND THEIR USE IN VAPOR DEPOSITION Public/Granted day:2011-06-23
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