Invention Grant
US09029218B2 Tunneling field-effect transistor with direct tunneling for enhanced tunneling current
有权
隧穿场效应晶体管,具有直接隧道效应,用于增强隧穿电流
- Patent Title: Tunneling field-effect transistor with direct tunneling for enhanced tunneling current
- Patent Title (中): 隧穿场效应晶体管,具有直接隧道效应,用于增强隧穿电流
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Application No.: US13856649Application Date: 2013-04-04
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Publication No.: US09029218B2Publication Date: 2015-05-12
- Inventor: Wei-Yip Loh , Brian Coss , Kanghoon Jeon
- Applicant: Sematech, Inc.
- Applicant Address: US NY Albany
- Assignee: Sematech, Inc.
- Current Assignee: Sematech, Inc.
- Current Assignee Address: US NY Albany
- Agency: Norton Rose Fulbright US LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/78

Abstract:
Horizontal and vertical tunneling field-effect transistors (TFETs) having an abrupt junction between source and drain regions increases probability of direct tunneling of carriers (e.g., electrons and holes). The increased probability allows a higher achievable on current in TFETs having the abrupt junction. The abrupt junction may be formed by placement of a dielectric layer or a dielectric layer and a semiconductor layer in a current path between the source and drain regions. The dielectric layer may be a low permittivity oxide such as silicon oxide, lanthanum oxide, zirconium oxide, or aluminum oxide.
Public/Granted literature
- US20130230954A1 TUNNELING FIELD-EFFECT TRANSISTOR WITH DIRECT TUNNELING FOR ENHANCED TUNNELING CURRENT Public/Granted day:2013-09-05
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