Invention Grant
- Patent Title: Self-aligning hybridization method
- Patent Title (中): 自对准杂交法
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Application No.: US13716759Application Date: 2012-12-17
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Publication No.: US09029259B2Publication Date: 2015-05-12
- Inventor: Philip A. Stupar , Yu-Hua K. Lin , Donald E. Cooper , Jeffrey F. DeNatale , William E. Tennant
- Applicant: Teledyne Scientific & Imaging, LLC
- Applicant Address: US CA Thousand Oaks
- Assignee: Teledyne Scientific & Imaging, LLC
- Current Assignee: Teledyne Scientific & Imaging, LLC
- Current Assignee Address: US CA Thousand Oaks
- Agency: Koppel, Patrick, Heybl & Philpott
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L31/02 ; H01L31/18 ; H01L23/13

Abstract:
A self-aligning hybridization method enabling small pixel pitch hybridizations with self-alignment and run-out protection. The method requires providing a first IC, the surface of which includes at least one electrical contact for connection to a mating IC, depositing an insulating layer on the IC's surface, patterning and etching the insulating layer to provide recesses in the insulating layer above each of the electrical contacts, and depositing a deformable conductive material in each of the recesses. A mating IC is provided which includes conductive pins positioned to align with the deformable conductive material in respective ones of the recesses on the first chip. The first and mating ICs are then hybridized by bringing the conductive pins into contact with the deformable conductive material in the recesses, such that the conductive material deforms and the pins make electrical contact with the first IC's electrical contacts.
Public/Granted literature
- US20140061838A1 SELF-ALIGNING HYBRIDIZATION METHOD Public/Granted day:2014-03-06
Information query
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