Invention Grant
- Patent Title: Carbon nanotube devices with unzipped low-resistance contacts
-
Application No.: US13685800Application Date: 2012-11-27
-
Publication No.: US09029841B2Publication Date: 2015-05-12
- Inventor: Damon B. Farmer , Aaron D. Franklin , Joshua T. Smith , George S. Tulevski
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Louis Percello
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L29/78 ; H01L21/02 ; H01L29/06 ; B82Y99/00

Abstract:
A method of creating a semiconductor device is disclosed. An end of a carbon nanotube is unzipped to provide a substantially flat surface. A contact of the semiconductor device is formed. The substantially flat surface of the carbon nanotube is coupled to the contact to create the semiconductor device. An energy gap in the unzipped end of the carbon nanotube may be less than an energy gap in a region of the carbon nanotube outside of the unzipped end region.
Public/Granted literature
- US20140117312A1 CARBON NANOTUBE DEVICES WITH UNZIPPED LOW-RESISTANCE CONTACTS Public/Granted day:2014-05-01
Information query
IPC分类: