Invention Grant
- Patent Title: Method and apparatus to allow a plurality of stages to operate in close proximity
- Patent Title (中): 允许多个台阶靠近操作的方法和装置
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Application No.: US13526994Application Date: 2012-06-19
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Publication No.: US09030057B2Publication Date: 2015-05-12
- Inventor: Michael B. Binnad , Pai-Hsueh Yang
- Applicant: Michael B. Binnad , Pai-Hsueh Yang
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: H02K41/02
- IPC: H02K41/02 ; G03F7/20 ; H02K41/03 ; H02K3/47

Abstract:
According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.
Public/Granted literature
- US20120328836A1 Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity Public/Granted day:2012-12-27
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