Invention Grant
US09030101B2 Frequency enhanced impedance dependent power control for multi-frequency RF pulsing
有权
针对多频RF脉冲的频率增强型阻抗相关功率控制
- Patent Title: Frequency enhanced impedance dependent power control for multi-frequency RF pulsing
- Patent Title (中): 针对多频RF脉冲的频率增强型阻抗相关功率控制
-
Application No.: US13621759Application Date: 2012-09-17
-
Publication No.: US09030101B2Publication Date: 2015-05-12
- Inventor: John C. Valcore, Jr. , Bradford J. Lyndaker
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Methods for processing a substrate in a plasma processing, chamber employing a plurality of RF power supplies. The method includes pulsing at a first pulsing frequency a first RF power supply to deliver a first RF signal between a high power state and a low power state. The method further includes switching the RF frequency of a second RF signal output by a second RF power supply between a first predefined RF frequency and a second RF frequency responsive to values of a measurable chamber parameter. The first RF frequency and the second RF frequencies and the thresholds for switching were learned in advance during a learning phase while the first RF signal pulses between the high power state and low power state at a second RF frequency lower than the first RF frequency and while the second RF power supply operates in different modes.
Public/Granted literature
- US20130214682A1 FREQUENCY ENHANCED IMPEDANCE DEPENDENT POWER CONTROL FOR MULTI-FREQUENCY RF PULSING Public/Granted day:2013-08-22
Information query