Invention Grant
US09030547B2 Method and measuring system for scanning multiple regions of interest 有权
用于扫描多个感兴趣区域的方法和测量系统

Method and measuring system for scanning multiple regions of interest
Abstract:
The invention relates to a method for carrying out measurements on at least one region of interest within a sample via a laser scanning microscope having focusing means for focusing a laser beam and having electro-mechano-optic deflector for deflecting the laser beam, the method comprising: providing a scanning trajectory for the at least one region of interest; providing a sequence of measurements and the corresponding scanning trajectories; providing cross-over trajectories between the scanning trajectories of two consecutive measurements; deflecting the laser beam via the electro-mechano-optic means for moving a focus spot of the focused laser beam along a scanning trajectory at an average scanning speed; and deflecting the laser beam via the electro-mechano-optic means for moving the focus spot of the laser beam along a cross-over trajectory at a cross-over speed having a maximum, the maximum of the cross-over speed being higher than the average scanning speed. The invention further relates to a measuring system for implementing the method according to the invention
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