Invention Grant
US09030652B2 Non-contact, optical sensor for synchronizing to free rotating sample platens with asymmetry
有权
非接触式光学传感器，用于与不对称的自由旋转样品台同步
- Patent Title: Non-contact, optical sensor for synchronizing to free rotating sample platens with asymmetry
- Patent Title (中): 非接触式光学传感器，用于与不对称的自由旋转样品台同步
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Application No.: US13691829Application Date: 2012-12-02
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Publication No.: US09030652B2Publication Date: 2015-05-12
- Inventor: Scott Hines , Darryl Barlett , Charles A. Taylor, II , Greg DeMaggio
- Applicant: k-Space Associates, Inc.
- Applicant Address: US MI Dexter
- Assignee: k-Space Associates, Inc.
- Current Assignee: k-Space Associates, Inc.
- Current Assignee Address: US MI Dexter
- Agency: Endurance Law Group, PLC
- Main IPC: G01P3/36
- IPC: G01P3/36 ; G01J3/28 ; G01B11/02 ; G01N21/00 ; G01N21/47 ; G01P3/486 ; H01L21/67 ; H01L21/687
Abstract:
A method and apparatus for determining the synchronicity of a rotary platen (22) in a vacuum deposition chamber (24). A light source (64) projects a highly collimated light beam (66) onto the rotating platen (22), thereby tracing a circular swept path (67). The swept path (67) passes alternately through samples (20) on the platen (22) and intervening webs (58, 60). The samples (20) are significantly more reflective than the webs (58, 60). The platen (22) includes an asymmetry feature (60) along the swept path (67). A detector (62) measures light signals reflected from the platen (22) along the swept path (67), and generates a unique signal upon encountering the asymmetry feature (60). A microcontroller generates a trigger pulse synchronized to the unique signal.
Public/Granted literature
- US20130141711A1 NON-CONTACT, OPTICAL SENSOR FOR SYNCHRONIZING TO FREE ROTATING SAMPLE PLATENS WITH ASYMMETRY Public/Granted day:2013-06-06
Information query
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