Invention Grant
US09030664B2 Apparatus for measuring transmissivity of patterned glass substrate
有权
用于测量图案化玻璃基板的透射率的装置
- Patent Title: Apparatus for measuring transmissivity of patterned glass substrate
- Patent Title (中): 用于测量图案化玻璃基板的透射率的装置
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Application No.: US13334845Application Date: 2011-12-22
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Publication No.: US09030664B2Publication Date: 2015-05-12
- Inventor: Kyungwook Park , YoonYoung Kwon , Jaeyoung Choi , Jongsung Lee , Hoikwan Lee , Seo-Yeong Cho , Kyungmin Yoon
- Applicant: Kyungwook Park , YoonYoung Kwon , Jaeyoung Choi , Jongsung Lee , Hoikwan Lee , Seo-Yeong Cho , Kyungmin Yoon
- Applicant Address: KR
- Assignee: Samsung Corning Precision Materials Co., Ltd.
- Current Assignee: Samsung Corning Precision Materials Co., Ltd.
- Current Assignee Address: KR
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Priority: KR10-2010-0139257 20101230
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/958 ; G01N21/59

Abstract:
An apparatus for measuring transmissivity of a patterned glass substrate. A beam radiator radiates a laser beam. A collimation lens collimates the laser beam radiated from the laser beam radiator. A beam expander expands a size of the laser beam collimated by the collimation lens. A detector has a light-receiving section, which receives the laser beam that has passed through the patterned glass substrate after having been expanded by the beam expander. A measuring instrument measures a transmissivity of the patterned glass substrate using the laser beam received by the detector.
Public/Granted literature
- US20120170040A1 APPARATUS FOR MEASURING TRANSMISSIVITY OF PATTERNED GLASS SUBSTRATE Public/Granted day:2012-07-05
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