A method for fabricating a micro lens array is provided. The method includes forming a first lens material structure on a substrate. The first lens material structure includes a plurality of elevated portions. The elevated portions are separated by recesses. Moreover, the plurality of elevated portions have an average height of at least 3 micrometers. Furthermore, the method for fabricating a micro lens array includes depositing a dielectric material on the first lens material structure and the recesses to form a second lens material structure. The second lens material structure has an average thickness of at least 1 micrometer. Moreover, the first and second lens material structures form together the micro lens array.