Invention Grant
US09031683B2 Systems and methods for managing material storage vessels having information storage elements
有权
用于管理具有信息存储元件的材料储存容器的系统和方法
- Patent Title: Systems and methods for managing material storage vessels having information storage elements
- Patent Title (中): 用于管理具有信息存储元件的材料储存容器的系统和方法
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Application No.: US12307957Application Date: 2007-07-10
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Publication No.: US09031683B2Publication Date: 2015-05-12
- Inventor: Scott Elfstrom , Kathleen L. Hanson , Steven E. Haumersen , Thomas D. Johnson , Clari Nolet , William Smeaton
- Applicant: Scott Elfstrom , Kathleen L. Hanson , Steven E. Haumersen , Thomas D. Johnson , Clari Nolet , William Smeaton
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Hultquist, PLLC
- Agent Steven J. Hultquist; Cathy Gates
- International Application: PCT/US2007/073107 WO 20070710
- International Announcement: WO2008/011297 WO 20080124
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G06F17/30 ; G01N37/00 ; G06Q10/06 ; G07C9/00

Abstract:
Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.
Public/Granted literature
- US20100004772A1 SYSTEMS AND METHODS FOR MANAGING MATERIAL STORAGE VESSELS HAVING INFORMATION STORAGE ELEMENTS Public/Granted day:2010-01-07
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