Invention Grant
US09032795B2 MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
有权
MEMS谐振器，具有相同的传感器和用于MEMS谐振器的制造方法
- Patent Title: MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
- Patent Title (中): MEMS谐振器，具有相同的传感器和用于MEMS谐振器的制造方法
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Application No.: US13519451Application Date: 2011-05-04
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Publication No.: US09032795B2Publication Date: 2015-05-19
- Inventor: Geunbae Lim , Taechang An , Jinyoung Kim , Jungwoo Sung , Sangwoo Lee
- Applicant: Geunbae Lim , Taechang An , Jinyoung Kim , Jungwoo Sung , Sangwoo Lee
- Applicant Address: KR Daejeon
- Assignee: AGENCY FOR DEFENSE DEVELOPMENT
- Current Assignee: AGENCY FOR DEFENSE DEVELOPMENT
- Current Assignee Address: KR Daejeon
- Agency: Scully, Scott, Murphy & Presser, P.C.
- International Application: PCT/KR2011/003333 WO 20110504
- International Announcement: WO2012/138006 WO 20121011
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01P15/125 ; H03H3/007 ; G01C19/5783 ; H03H9/02 ; H03H9/24 ; B81C1/00
Abstract:
A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled.
Public/Granted literature
- US20120279302A1 MEMS RESONATOR, SENSOR HAVING THE SAME AND MANUFACUTRING METHOD FOR MEMS RESONATOR Public/Granted day:2012-11-08
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