Invention Grant
- Patent Title: OHT accessible high density stocker and method
- Patent Title (中): OHT可接近的高密度储存器和方法
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Application No.: US11736188Application Date: 2007-04-17
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Publication No.: US09033638B2Publication Date: 2015-05-19
- Inventor: Jeffrey P Gifford , David J. Pinckney , Peter J. Shaffer , Uldis A. Ziemins
- Applicant: Jeffrey P Gifford , David J. Pinckney , Peter J. Shaffer , Uldis A. Ziemins
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent William Steinberg
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G1/12
Abstract:
A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.
Public/Granted literature
- US20080260504A1 OHT ACCESSIBLE HIGH DENSITY STOCKER AND METHOD Public/Granted day:2008-10-23
Information query
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