Invention Grant
- Patent Title: Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub
- Patent Title (中): 臂架驱动装置，多臂机器人装置，电子装置处理系统以及用于在电子装置制造系统中传送基板的方法
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Application No.: US13923741Application Date: 2013-06-21
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Publication No.: US09033644B2Publication Date: 2015-05-19
- Inventor: Jeffrey C. Hudgens , Izya Kremerman , Jeffrey A. Brodine
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B25J9/04
- IPC: B25J9/04 ; B25J18/00 ; B25J9/00 ; B25J9/10
Abstract:
Boom drive apparatus for substrate transport systems and methods are described. The boom drive apparatus is adapted to drive one or more multi-arm robots rotationally mounted to the boom to efficiently put or pick substrates. The boom drive apparatus has a boom including a hub, a web, a first pilot above the web, and a second pilot below the web, a first driving member rotationally mounted to the first pilot, a second driving member rotationally mounted to the second pilot, a first driven member rotationally mounted to the boom above the a web, a second driven member rotationally mounted to the boom below the a web, and a first and second transmission members coupling the driving members to driven members located outboard on the boom. Numerous other aspects are provided.
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