Invention Grant
US09034103B2 Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them 有权
对紫外线具有高透明度的氮化铝本体晶体及其形成方法

Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
Abstract:
In various embodiments, methods of forming single-crystal AlN include providing a substantially undoped polycrystalline AlN ceramic having an oxygen concentration less than approximately 100 ppm, forming a single-crystal bulk AlN crystal by a sublimation-recondensation process at a temperature greater than approximately 2000° C., and cooling the bulk AlN crystal to a first temperature between approximately 1500° C. and approximately 1800° C. at a first rate less than approximately 250° C./hour.
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