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US09034139B2 Temporary adhesion of chemically similar substrates 有权
化学相似底物的临时粘附

Temporary adhesion of chemically similar substrates
Abstract:
A temporary adhesive for reversibly bonding a silicon wafer to a silicon support contains a crosslinkable organopolysiloxanes composition and a fatty acid or salt thereof or fatty acid ester as a release regulator having a density different from the crosslinkable organopolysiloxanes composition of at least 0.1 g/cm3, which upon parting of the wafer from the substrate, the adhesive remains substantially adhered to the substrate.
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