Invention Grant
- Patent Title: Nonmagnetic material particle dispersed ferromagnetic material sputtering target
- Patent Title (中): 非磁性材料颗粒分散铁磁材料溅射靶
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Application No.: US12160042Application Date: 2006-12-26
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Publication No.: US09034153B2Publication Date: 2015-05-19
- Inventor: Kazuyuki Satoh
- Applicant: Kazuyuki Satoh
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2006-006575 20060113
- International Application: PCT/JP2006/325883 WO 20061226
- International Announcement: WO2007/080781 WO 20070719
- Main IPC: C23C14/34
- IPC: C23C14/34 ; G11B5/851 ; H01F41/18

Abstract:
Provided is a nonmagnetic material particle dispersed ferromagnetic material sputtering target comprising a material including nonmagnetic material particles dispersed in a ferromagnetic material. The nonmagnetic material particle dispersed ferromagnetic material sputtering target is characterized in that all particles of the nonmagnetic material with a structure observed on the material in its polished face have a shape and size that are smaller than all imaginary circles having a radius of 2 μm formed around an arbitrary point within the nonmagnetic material particles, or that have at least two contact points or intersection points between the imaginary circles and the interface of the ferromagnetic material and the nonmagnetic material. The nonmagnetic material particle dispersed ferromagnetic material sputtering target is advantageous in that, in the formation of a film by sputtering, the influence of heating or the like on a substrate can be reduced, high-speed deposition by DC sputtering is possible, the film thickness can be regulated to be thin, the generation of particles (dust) or nodules can be reduced during sputtering, the variation in quality can be reduced to improve the mass productivity, fine crystal grains and high density can be realized, and the nonmagnetic material particle dispersed ferromagnetic material sputtering target is particularly best suited for use as a magnetic recording layer.
Public/Granted literature
- US20090242393A1 Nonmagnetic Material Particle Dispersed Ferromagnetic Material Sputtering Target Public/Granted day:2009-10-01
Information query
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