Invention Grant
US09034711B2 LDMOS with two gate stacks having different work functions for improved breakdown voltage
有权
LDMOS具有两个栅极叠层,具有不同的功能,可提高击穿电压
- Patent Title: LDMOS with two gate stacks having different work functions for improved breakdown voltage
- Patent Title (中): LDMOS具有两个栅极叠层,具有不同的功能,可提高击穿电压
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Application No.: US13046332Application Date: 2011-03-11
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Publication No.: US09034711B2Publication Date: 2015-05-19
- Inventor: Eng Huat Toh , Jae Gon Lee , Chung Foong Tan , Elgin Quek
- Applicant: Eng Huat Toh , Jae Gon Lee , Chung Foong Tan , Elgin Quek
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/78 ; H01L29/423 ; H01L29/51 ; H01L29/49 ; H01L29/66

Abstract:
An LDMOS is formed with a second gate stack over the n− drift region, having a common gate electrode with the gate stack, and having a higher work function than the gate stack. Embodiments include forming a first conductivity type well, having a source, surrounded by a second conductivity type well, having a drain, in a substrate, forming first and second gate stacks on the substrate over a portion of the first well and a portion of the second well, respectively, the first and second gate stacks sharing a common gate electrode, and tuning the work functions of the first and second gate stacks to obtain a higher work function for the second gate stack. Other embodiments include forming the first gate stack with a first high-k dielectric and the second gate stack with a second high-k dielectric, and forming the first and second gate stacks with asymmetric dielectrics.
Public/Granted literature
- US20120228705A1 LDMOS WITH IMPROVED BREAKDOWN VOLTAGE Public/Granted day:2012-09-13
Information query
IPC分类: