Invention Grant
US09034711B2 LDMOS with two gate stacks having different work functions for improved breakdown voltage 有权
LDMOS具有两个栅极叠层,具有不同的功能,可提高击穿电压

LDMOS with two gate stacks having different work functions for improved breakdown voltage
Abstract:
An LDMOS is formed with a second gate stack over the n− drift region, having a common gate electrode with the gate stack, and having a higher work function than the gate stack. Embodiments include forming a first conductivity type well, having a source, surrounded by a second conductivity type well, having a drain, in a substrate, forming first and second gate stacks on the substrate over a portion of the first well and a portion of the second well, respectively, the first and second gate stacks sharing a common gate electrode, and tuning the work functions of the first and second gate stacks to obtain a higher work function for the second gate stack. Other embodiments include forming the first gate stack with a first high-k dielectric and the second gate stack with a second high-k dielectric, and forming the first and second gate stacks with asymmetric dielectrics.
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