Invention Grant
US09035216B2 Method and device for controlling interior fractures by controlling the laser pulse width 有权
通过控制激光脉冲宽度来控制内部裂缝的方法和装置

  • Patent Title: Method and device for controlling interior fractures by controlling the laser pulse width
  • Patent Title (中): 通过控制激光脉冲宽度来控制内部裂缝的方法和装置
  • Application No.: US13262995
    Application Date: 2010-03-29
  • Publication No.: US09035216B2
    Publication Date: 2015-05-19
  • Inventor: Ryuji Sugiura
  • Applicant: Ryuji Sugiura
  • Applicant Address: JP Hamamatsu-shi, Shizuoka
  • Assignee: HAMAMATSU PHOTONICS K.K.
  • Current Assignee: HAMAMATSU PHOTONICS K.K.
  • Current Assignee Address: JP Hamamatsu-shi, Shizuoka
  • Agency: Drinker Biddle & Reath LLP
  • Priority: JP2009-092846 20090407
  • International Application: PCT/JP2010/055585 WO 20100329
  • International Announcement: WO2010/116917 WO 20101014
  • Main IPC: B23K26/402
  • IPC: B23K26/402 B23K26/40
Method and device for controlling interior fractures by controlling the laser pulse width
Abstract:
A laser processing device (100) comprises a laser light source (101) for emitting a laser light (L) and a laser light source controller (102) for controlling the pulse width of the laser light (L) and irradiates an object to be processed (1) with the laser light (L) while locating a converging point (P) within the object (1), so as to form a modified region along a line to cut (5) of the object (1) and generate a fracture extending in a thickness direction of the object (1) from the modified region as the modified region is formed. In the laser processing device (100), the laser light source controller (102) changes the pulse width of the laser light (L) according to a data table in which the fracture length, the thickness of the object (1), and the pulse width of the laser light (L) are associated with each other. That is, the pulse width is changed according to the fracture length generated from the modified region. Therefore, the laser processing device (100) can generate a fracture having a desirable length from the modified region.
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