Invention Grant
- Patent Title: Micro electro mechanical systems device
- Patent Title (中): 微机电系统装置
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Application No.: US14030541Application Date: 2013-09-18
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Publication No.: US09035400B2Publication Date: 2015-05-19
- Inventor: Jong Woon Kim , Po Chul Kim , Yu Heon Yi , Jun Lim
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Gyunggi-Do
- Agency: Ladas & Parry, LLP
- Priority: KR10-2012-0105391 20120921
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; G01P15/09 ; G01P15/12 ; G01P15/125 ; G01C19/5656 ; G01P15/08
Abstract:
Disclosed herein is a micro electro mechanical systems (MEMS) device including: a mass body; a first fixed part provided at an outer side of the mass body; and a first flexible part having one end connected to a distal end of the mass body and the other end connected to the first fixed part, wherein the mass body is rotatably connected to the first flexible part.
Public/Granted literature
- US20140084393A1 MICRO ELECTRO MECHANICAL SYSTEMS DEVICE Public/Granted day:2014-03-27
Information query
IPC分类:
