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US09035401B2 Physical quantity detection device and physical quantity detector 有权
物理量检测装置和物理量检测器

Physical quantity detection device and physical quantity detector
Abstract:
A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.
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