Invention Grant
- Patent Title: Physical quantity detection device and physical quantity detector
- Patent Title (中): 物理量检测装置和物理量检测器
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Application No.: US14247349Application Date: 2014-04-08
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Publication No.: US09035401B2Publication Date: 2015-05-19
- Inventor: Taketomo Nakane , Yoshihiro Haseko , Yuki Shimazu
- Applicant: Taketomo Nakane , Yoshihiro Haseko , Yuki Shimazu
- Applicant Address: JP Tokyo
- Assignee: Mitsumi Electric Co., Ltd.
- Current Assignee: Mitsumi Electric Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2013-092363 20130425
- Main IPC: H01L23/10
- IPC: H01L23/10 ; G01L9/00 ; H01L23/31 ; H01L29/84 ; H01L23/00

Abstract:
A physical quantity detection device includes a glass substrate, a substrate including a physical quantity detection part and bonded to a first surface of the glass substrate with a hermetically sealed space being formed inside the substrate, and a function membrane formed on a second surface of the glass substrate opposite to the first surface. The function membrane prevents the second surface of the glass substrate from coming into contact with moisture in the atmosphere.
Public/Granted literature
- US20140319628A1 PHYSICAL QUANTITY DETECTION DEVICE AND PHYSICAL QUANTITY DETECTOR Public/Granted day:2014-10-30
Information query
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