Invention Grant
US09035464B2 3D IC with serial gate MOS device, and method of making the 3D IC
有权
具有串行栅极MOS器件的3D IC和制造3D IC的方法
- Patent Title: 3D IC with serial gate MOS device, and method of making the 3D IC
- Patent Title (中): 具有串行栅极MOS器件的3D IC和制造3D IC的方法
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Application No.: US14014472Application Date: 2013-08-30
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Publication No.: US09035464B2Publication Date: 2015-05-19
- Inventor: Chao Chieh Li , Ruey-Bin Sheen , Chih-Hsien Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Agent Steven E. Koffs
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L23/48 ; H01L23/522 ; H01L21/768

Abstract:
A die stack comprises a first integrated circuit (IC) die having at least a first device comprising a first source, a first drain and a first gate electrode above a first channel region between the first source and the first drain. A second IC die has at least a second device comprising a second source, a second drain and a second gate electrode above a second channel region between the second source and the second drain. The second gate electrode is connected to the first gate electrode by a path including a first through substrate via (TSV), the second drain connected to the first source by a path including a second TSV.
Public/Granted literature
- US20150061148A1 3D IC WITH SERIAL GATE MOS DEVICE, AND METHOD OF MAKING THE 3D IC Public/Granted day:2015-03-05
Information query
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