Invention Grant
US09035532B2 Ultrasonic sensor microarray and method of manufacturing same 有权
超声波传感器微阵列及其制造方法

Ultrasonic sensor microarray and method of manufacturing same
Abstract:
A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 Hz.
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