Invention Grant
US09035535B2 Acoustic wave device and multilayered substrate 有权
声波装置和多层基板

Acoustic wave device and multilayered substrate
Abstract:
An acoustic wave device includes: a substrate; a functional element that is located on the substrate and excites acoustic waves; a side wall portion that is made of a metal and is located on the substrate so as to surround the functional element; a metal plate that is located above the functional element and the side wall portion, and seals the functional element so that a space is formed above the functional element; and a terminal that is located on the substrate and further out than the side wall portion, and is electrically connected to the functional element.
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