Invention Grant
- Patent Title: Hybrid plasma reactor
- Patent Title (中): 混合等离子体反应器
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Application No.: US13673513Application Date: 2012-11-09
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Publication No.: US09035553B2Publication Date: 2015-05-19
- Inventor: Dae-Kyu Choi
- Applicant: Dae-Kyu Choi
- Applicant Address: KR Gyeonggi-do
- Assignee: Dae-Kyu Choi
- Current Assignee: Dae-Kyu Choi
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2011-0116138 20111109; KR10-2011-0117240 20111110; KR10-2011-0143294 20111227; KR10-2011-0143302 20111227
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H01J37/32

Abstract:
A hybrid plasma reactor includes a reactor body having a plasma discharge space, a gas inlet, and a gas outlet; a hybrid plasma source including an inductive antenna inductively coupled to plasma formed in the plasma discharge space and a primary winding coil transformer coupled to the plasma and wound in a magnetic core; and an alternating switching power supply for supplying plasma generation power to the inductive antenna and the primary winding coil. The hybrid plasma reactor induces a plasma discharge using the inductively coupled plasma source and the transformer coupled plasma source, so that it has a wide operational area from a low pressure area to a high pressure area.
Public/Granted literature
- US20130307414A1 HYBRID PLASMA REACTOR Public/Granted day:2013-11-21
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