Invention Grant
US09035553B2 Hybrid plasma reactor 有权
混合等离子体反应器

  • Patent Title: Hybrid plasma reactor
  • Patent Title (中): 混合等离子体反应器
  • Application No.: US13673513
    Application Date: 2012-11-09
  • Publication No.: US09035553B2
    Publication Date: 2015-05-19
  • Inventor: Dae-Kyu Choi
  • Applicant: Dae-Kyu Choi
  • Applicant Address: KR Gyeonggi-do
  • Assignee: Dae-Kyu Choi
  • Current Assignee: Dae-Kyu Choi
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: IP & T Group LLP
  • Priority: KR10-2011-0116138 20111109; KR10-2011-0117240 20111110; KR10-2011-0143294 20111227; KR10-2011-0143302 20111227
  • Main IPC: H01J7/24
  • IPC: H01J7/24 H01J37/32
Hybrid plasma reactor
Abstract:
A hybrid plasma reactor includes a reactor body having a plasma discharge space, a gas inlet, and a gas outlet; a hybrid plasma source including an inductive antenna inductively coupled to plasma formed in the plasma discharge space and a primary winding coil transformer coupled to the plasma and wound in a magnetic core; and an alternating switching power supply for supplying plasma generation power to the inductive antenna and the primary winding coil. The hybrid plasma reactor induces a plasma discharge using the inductively coupled plasma source and the transformer coupled plasma source, so that it has a wide operational area from a low pressure area to a high pressure area.
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