Invention Grant
- Patent Title: 3D MEMS magnetometer
- Patent Title (中): 3D MEMS磁力计
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Application No.: US13844958Application Date: 2013-03-16
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Publication No.: US09035649B2Publication Date: 2015-05-19
- Inventor: Yee-Chung Fu
- Applicant: Advanced NuMicro Systems, Inc.
- Applicant Address: US CA San Jose
- Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee: Advanced NuMicro Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patent Law Group LLP
- Agent David C. Hsia
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/028

Abstract:
A micro-electromechanical systems (MEMS) magnetometer includes first fixed electrodes, second fixed electrodes, a mobile element to rotate about a first rotation axis along a first direction and translate along a second direction orthogonal to the first direction, mobile electrodes extending from the first mobile element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a rotation element coupled to the mobile element to rotate about a second rotation axis along the second direction, the rotation element having a surface opposite the second fixed electrodes to form second sensor assemblies, the second fixed electrode being displaced from the surface of the rotation element along a third direction, and a trace having sections along the first direction and offset from the first rotation axis and along the second direction and offset from the second rotation axis.
Public/Granted literature
- US20130241546A1 3D MEMS MAGNETOMETER Public/Granted day:2013-09-19
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