Invention Grant
- Patent Title: Six-axis four-subdividing interferometer
- Patent Title (中): 六轴四分割干涉仪
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Application No.: US14152991Application Date: 2014-01-10
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Publication No.: US09036155B2Publication Date: 2015-05-19
- Inventor: Jianfang Chen , Zhaogu Cheng , Ya Cheng , Huijie Huang , Feng Chi
- Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences , Shanghai Micro Electronics Equipment Co., Ltd.
- Applicant Address: CN Shanghai CN Shanghai
- Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences,Shanghai Micro Electronics Equipment Co., Ltd.
- Current Assignee: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences,Shanghai Micro Electronics Equipment Co., Ltd.
- Current Assignee Address: CN Shanghai CN Shanghai
- Agency: Mei & Mark LLP
- Agent Manni Li
- Priority: CN201110206449 20110722
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02
Abstract:
Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting mirrors.
Public/Granted literature
- US20140125989A1 SIX-AXIS FOUR-SUBDIVIDING INTERFEROMETER Public/Granted day:2014-05-08
Information query
