Invention Grant
- Patent Title: Calibration of a chemical dispense system
- Patent Title (中): 化学分配系统的校准
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Application No.: US14030968Application Date: 2013-09-18
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Publication No.: US09038650B2Publication Date: 2015-05-26
- Inventor: Rajesh Kelekar
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B67D7/08
- IPC: B67D7/08 ; H01L21/67 ; F04B49/06
Abstract:
In one implementation, a method for providing a fluid at a target pressure may include providing a fluid at a velocity to a supply line through a dispenser, measuring a pressure of the fluid flowing through the supply line, comparing the measured pressure with the target pressure, and adjusting the velocity based on the results of the comparison.
Public/Granted literature
- US20140014681A1 Calibration of a Chemical Dispense System Public/Granted day:2014-01-16
Information query
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