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US09039280B2 Highly-reliable micro-electromechanical system temperature sensor 有权
高可靠性的微机电系统温度传感器

Highly-reliable micro-electromechanical system temperature sensor
Abstract:
A micro-electromechanical system-type (MEMS) sensor arrangement for wirelessly measuring temperatures is disclosed. The MEMS sensor arrangement includes a multimorph sensor, a sensor coil coupled to the multimorph sensor, and a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of the natural frequency of the multimorph sensor, the sensor coil and the readout coil.
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