Invention Grant
US09039976B2 MEMS sensors with closed nodal anchors for operation in an in-plane contour mode
有权
具有闭合节点锚的MEMS传感器，用于在平面内轮廓模式下操作
- Patent Title: MEMS sensors with closed nodal anchors for operation in an in-plane contour mode
- Patent Title (中): 具有闭合节点锚的MEMS传感器，用于在平面内轮廓模式下操作
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Application No.: US13017247Application Date: 2011-01-31
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Publication No.: US09039976B2Publication Date: 2015-05-26
- Inventor: Andrew Sparks , William D. Sawyer
- Applicant: Andrew Sparks , William D. Sawyer
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01N29/02
- IPC: G01N29/02 ; G01N29/036 ; H03H9/10 ; H03H9/02
Abstract:
A MEMS sensor includes at least one closed nodal anchor along a predetermined closed nodal path on at least one surface of a resonant mass. The resonant mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes may be disposed within a cavity formed at least in part by the resonant mass, the closed nodal anchor, and a substrate.
Public/Granted literature
- US20120195797A1 MEMS Sensors with Closed Nodal Anchors for Operation in an In-Plane Contour Mode Public/Granted day:2012-08-02
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