Invention Grant
US09040322B2 Method for manufacturing semiconductor light emitting element 有权
半导体发光元件的制造方法

Method for manufacturing semiconductor light emitting element
Abstract:
According to one embodiment, a method is disclosed for manufacturing a semiconductor light emitting element. The method can include bonding a stacked main body of a structural body to a substrate main body. The structural body includes a growth substrate and the stacked main body provided on the growth substrate. The stacked main body includes a first nitride semiconductor film, a light emitting film provided on the first nitride semiconductor film, and a second nitride semiconductor film provided on the light emitting film. The method can include removing the growth substrate. The method can include forming a plurality of stacked bodies. The method can include forming an uneven portion in a surface of a first nitride semiconductor layer. The method can include forming a plurality of the semiconductor light emitting elements.
Public/Granted literature
Information query
Patent Agency Ranking
0/0