Invention Grant
- Patent Title: Sidewalls of electroplated copper interconnects
- Patent Title (中): 电镀铜互连的侧壁
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Application No.: US14043079Application Date: 2013-10-01
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Publication No.: US09040407B2Publication Date: 2015-05-26
- Inventor: Mukta G. Farooq , John A. Fitzsimmons , Troy L. Graves-Abe
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Steven Meyers; L. Jeffrey Kelly
- Main IPC: H05K3/42
- IPC: H05K3/42 ; H01L23/48 ; H01L23/532 ; H01L21/768

Abstract:
A method including depositing an alloying layer along a sidewall of an opening and in direct contact with a seed layer, the alloying layer includes a crystalline structure that cannot serve as a seed for plating a conductive material, exposing the opening to an electroplating solution including the conductive material, the conductive material is not present in the alloying layer, applying an electrical potential to a cathode causing the conductive material to deposit from the electroplating solution onto the cathode exposed at the bottom of the opening and causing the opening to fill with the conductive material, the cathode includes an exposed portion of the seed layer and excludes the alloying layer, and forming a first intermetallic compound along an intersection between the alloying layer and the conductive material, the first intermetallic compound is formed as a precipitate within a solid solution of the alloying layer and the conductive material.
Public/Granted literature
- US20140027296A1 SIDEWALLS OF ELECTROPLATED COPPER INTERCONNECTS Public/Granted day:2014-01-30
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