Invention Grant
US09041081B2 Image sensors having buried light shields with antireflective coating
有权
图像传感器具有防反射涂层的掩埋式防护罩
- Patent Title: Image sensors having buried light shields with antireflective coating
- Patent Title (中): 图像传感器具有防反射涂层的掩埋式防护罩
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Application No.: US13964462Application Date: 2013-08-12
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Publication No.: US09041081B2Publication Date: 2015-05-26
- Inventor: Victor Lenchenkov
- Applicant: Semiconductor Components Industries, LLC
- Applicant Address: US AZ Phoenix
- Assignee: Semiconductor Components Industries, LLC
- Current Assignee: Semiconductor Components Industries, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Treyz Law Group
- Agent Jason Tsai
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L27/146

Abstract:
An image sensor with an array of image sensor pixels is provided. Each image pixel may include a photodiode and associated pixel circuits formed in a semiconductor substrate. Buried light shielding structures may be formed on the substrate to prevent pixel circuitry that is formed in the substrate between two adjacent photodiodes from being exposed to incoming light. The buried light shielding structures may be lined with absorptive antireflective coating material to prevent light from being reflected off the surface of the buried light shielding structures. Forming buried light shielding structures with absorptive antireflective coating material can help reduce optical pixel crosstalk and enhance global shutter efficiency.
Public/Granted literature
- US20140077283A1 IMAGE SENSORS HAVING BURIED LIGHT SHIELDS WITH ANTIREFLECTIVE COATING Public/Granted day:2014-03-20
Information query
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