Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US13358643Application Date: 2012-01-26
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Publication No.: US09041104B2Publication Date: 2015-05-26
- Inventor: Emiko Sugizaki , Shigeru Kawanaka , Kanna Adachi
- Applicant: Emiko Sugizaki , Shigeru Kawanaka , Kanna Adachi
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-051671 20110309
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/739 ; H01L29/06 ; H01L29/423

Abstract:
A memory includes a semiconductor layer, a gate insulating film on the semiconductor layer, and a gate electrode on the gate insulating film. A first channel region of a first conductivity type is provided on a surface of the semiconductor layer below the gate insulating film. A diffusion layer of a second conductivity type is provided below the first channel region in the semiconductor layer. The diffusion layer contacts a bottom of the first channel region in a direction substantially vertical to a surface of the semiconductor layer. The diffusion layer forms a PN junction with the bottom of the first channel region. A drain of a first conductivity type and a source of a second conductivity type are provided on a side and another side of the first channel region. A sidewall film covers a side surface of the first channel region on a side of the diffusion layer.
Public/Granted literature
- US20120228706A1 SEMICONDUCTOR DEVICE Public/Granted day:2012-09-13
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