Invention Grant
- Patent Title: Wafer and a method of dicing a wafer
- Patent Title (中): 晶片和切割晶片的方法
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Application No.: US14188234Application Date: 2014-02-24
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Publication No.: US09041162B2Publication Date: 2015-05-26
- Inventor: Giuseppe Miccoli , Bhaskaran Jayachandran , Friedrich Steffen , Alfred Vater
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L23/544
- IPC: H01L23/544 ; G03F7/20 ; G03F9/00 ; H01L21/78 ; H01L23/00 ; H01L23/58 ; H01L21/66

Abstract:
A wafer includes a plurality of chips, each of the chips being spaced from each other by kerf-line regions including a reduced width.
Public/Granted literature
- US20140167226A1 Wafer and a Method of Dicing a Wafer Public/Granted day:2014-06-19
Information query
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