Invention Grant
- Patent Title: Drawing device and drawing method
- Patent Title (中): 绘图装置和绘图方法
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Application No.: US13086762Application Date: 2011-04-14
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Publication No.: US09041907B2Publication Date: 2015-05-26
- Inventor: Yoshiyuki Nakazawa , Yoshio Furuya , Ryosuke Ito , Kenji Nakanishi , Kazutaka Taniguchi , Ryo Yamada
- Applicant: Yoshiyuki Nakazawa , Yoshio Furuya , Ryosuke Ito , Kenji Nakanishi , Kazutaka Taniguchi , Ryo Yamada
- Applicant Address: JP
- Assignee: SCREEN HOLDINGS CO., LTD.
- Current Assignee: SCREEN HOLDINGS CO., LTD.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2010-220796 20100930; JP2011-047372 20110304
- Main IPC: G03B27/68
- IPC: G03B27/68 ; G03B27/32 ; G03B27/50 ; G03B27/52 ; G03F7/20

Abstract:
A drawing device draws a pattern on a substrate by radiating light from an optical head part on a target object (for example, substrate) which relatively moves with respect to the optical head part. Here, the optical head part has a spatial modulating unit which spatially modulates light from a light source, based on pattern data, and an optical path corrector which shifts the route of light spatially modulated in the spatial modulating unit at precision subdivided more than units of spatial modulation in the spatial modulating unit (more specifically, for example, units of pixels of spatial light modulator).
Public/Granted literature
- US20120081681A1 DRAWING DEVICE AND DRAWING METHOD Public/Granted day:2012-04-05
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