Invention Grant
- Patent Title: Component having a micromechanical microphone structure, and method for manufacturing same
- Patent Title (中): 具有微机械麦克风结构的部件及其制造方法
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Application No.: US13520444Application Date: 2010-11-05
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Publication No.: US09042581B2Publication Date: 2015-05-26
- Inventor: Jochen Zoellin , Axel Grosse , Bernhard Gehl
- Applicant: Jochen Zoellin , Axel Grosse , Bernhard Gehl
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102010000666 20100105
- International Application: PCT/EP2010/066854 WO 20101105
- International Announcement: WO2011/082861 WO 20110714
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R19/00

Abstract:
Measures for improving the acoustic properties of a microphone component produced in sacrificial layer technology. The micromechanical microphone structure of such a component is implemented in a layered structure, and includes at least one diaphragm, which is deflectable by sound pressure and which is implemented in a diaphragm layer, and a stationary acoustically permeable counterelement for the diaphragm which is implemented in a thick functional layer above the diaphragm layer and which is provided with through openings for introducing sound. The through openings for introducing sound are situated above the middle region of the diaphragm, while perforation openings which are largely acoustically passive are provided in the counterelement, above the edge region of the diaphragm.
Public/Granted literature
- US20130010989A1 COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE, AND METHOD FOR MANUFACTURING SAME Public/Granted day:2013-01-10
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