Invention Grant
- Patent Title: Optical switch and optical switch array
- Patent Title (中): 光开关和光开关阵列
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Application No.: US13603025Application Date: 2012-09-04
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Publication No.: US09042689B2Publication Date: 2015-05-26
- Inventor: Qinghua Chen , Haixia Zhang , Wengang Wu , Jun Zhao , Yunsheng Wen
- Applicant: Qinghua Chen , Haixia Zhang , Wengang Wu , Jun Zhao , Yunsheng Wen
- Applicant Address: CN Shenzhen
- Assignee: Huawei Technologies Co., Ltd.
- Current Assignee: Huawei Technologies Co., Ltd.
- Current Assignee Address: CN Shenzhen
- Priority: CN201010190130 20100527
- Main IPC: G02B6/26
- IPC: G02B6/26 ; G02B6/35 ; G02B7/182 ; C22F1/00 ; G02B26/08

Abstract:
An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.
Public/Granted literature
- US20130243372A1 OPTICAL SWITCH AND OPTICAL SWITCH ARRAY Public/Granted day:2013-09-19
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