A method for determining the coordinates of a point on the surface of an object is provided. A source system, such as an OBIRCH system, is used to analyze and detect faults in an integrated circuit on a semiconductor die. The die includes three reference points and the detected fault(s) are defined with reference to the reference points. When the die is transferred to a FIB or other system for fault analysis, a processor determines the coordinates of the fault(s) for the FIB system using the three reference points.