Invention Grant
US09043947B2 Near-field optical probe manufacturing using organo-mineral material and sol-gel process
有权
使用有机矿物材料和溶胶 - 凝胶法制造近场光学探头
- Patent Title: Near-field optical probe manufacturing using organo-mineral material and sol-gel process
- Patent Title (中): 使用有机矿物材料和溶胶 - 凝胶法制造近场光学探头
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Application No.: US13979274Application Date: 2012-01-09
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Publication No.: US09043947B2Publication Date: 2015-05-26
- Inventor: Pascal Falgayrettes , Raphael Kribich , Laurent Nativel , Bachar Mourched , Pascale Gall-Borrut , Benoit Belier
- Applicant: Pascal Falgayrettes , Raphael Kribich , Laurent Nativel , Bachar Mourched , Pascale Gall-Borrut , Benoit Belier
- Applicant Address: FR Paris FR Montpellier
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE MONTPELLIER 2 SCIENCES ET TECHNIQUES
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE MONTPELLIER 2 SCIENCES ET TECHNIQUES
- Current Assignee Address: FR Paris FR Montpellier
- Agency: Greer, Burns & Crain, Ltd.
- Priority: EP11305043 20110114
- International Application: PCT/EP2012/050208 WO 20120109
- International Announcement: WO2012/095376 WO 20120719
- Main IPC: G01Q60/22
- IPC: G01Q60/22 ; G01Q70/14 ; G01Q60/06 ; G01Q60/38 ; B82Y20/00 ; B82Y35/00
Abstract:
A method is provided for manufacturing near-field optical probes including at least one organo-mineral material with an organic part and a mineral part, the method including steps of irradiating at least partially the organo-mineral material with a radiation beam to polymerize the organic part in the irradiated areas, and polycondensing the mineral part by sol-gel process. Also disclosed are near-field optical probes and AFM and SNOM systems using the probes.
Public/Granted literature
- US20130298295A1 NEAR-FIELD OPTICAL PROBE MANUFACTURING USING ORGANO-MINERAL MATERIAL AND SOL-GEL PROCESS Public/Granted day:2013-11-07
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