Invention Grant
- Patent Title: Micromechanical element which can be deflected
- Patent Title (中): 可偏转的微机械元件
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Application No.: US12093834Application Date: 2005-11-25
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Publication No.: US09045329B2Publication Date: 2015-06-02
- Inventor: Alexander Wolter , Thomas Klose
- Applicant: Alexander Wolter , Thomas Klose
- Applicant Address: DE München
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung E.V.
- Current Assignee Address: DE München
- Agency: Gibson & Dernier LLP
- Agent Matthew B. Dernier, Esq.
- International Application: PCT/DE2005/002182 WO 20051125
- International Announcement: WO2007/059718 WO 20070531
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00

Abstract:
The invention relates to deflectable micromechanical elements which can preferably be deflected in translation and optionally also in an oscillatory manner. With respect to known solutions, it is the object of the invention to enable larger deflections with a simultaneously improved resistance toward lateral forces and torques. In this connection, a suspension having at least one spring system is present at elements in accordance with the invention. Levers pivotally connected to torsion spring elements are present at spring systems. Torsion spring elements of a spring system are aligned in a common axis and/or a plurality of axes arranged parallel to one another and at least one torsion spring element is fixedly clamped.
Public/Granted literature
- US20080284078A1 Micromechanical Element Which Can be Deflected Public/Granted day:2008-11-20
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