Invention Grant
US09045833B2 Etchant composition and method of forming metal wire and thin film transistor array panel using the same
有权
蚀刻剂组成和形成金属线和薄膜晶体管阵列面板的方法使用相同
- Patent Title: Etchant composition and method of forming metal wire and thin film transistor array panel using the same
- Patent Title (中): 蚀刻剂组成和形成金属线和薄膜晶体管阵列面板的方法使用相同
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Application No.: US13718557Application Date: 2012-12-18
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Publication No.: US09045833B2Publication Date: 2015-06-02
- Inventor: In-Bae Kim , Jong-Hyun Choung , Seon-Il Kim , Hong-Sick Park , Wang Woo Lee , Jae-Woo Jeong , In Seol Kuk , Sang-Tae Kim , Young-Chul Park , Keyong Bo Shim , In-Ho Yu , Young-Jin Yoon , Suck-Jun Lee , Joon-Woo Lee , Sang-Hoon Jang , Young-Jun Jin
- Applicant: SAMSUNG DISPLAY CO., LTD. , DONGWOO FINE-CHEM CO., LTD.
- Applicant Address: KR Yongin
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2012-0079973 20120723
- Main IPC: C09K13/06
- IPC: C09K13/06 ; C23F1/18 ; H01L21/28 ; C23F1/26 ; H01L27/12 ; H01L21/3213

Abstract:
A etchant composition that includes, based on a total weight of the etchant composition, about 0.5 wt % to about 20 wt % of a persulfate, about 0.5 wt % to about 0.9 wt % of an ammonium fluoride, about 1 wt % to about 10 wt % of an inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 10.0 wt % of a sulfonic acid, about 5 wt % to about 10 wt % of an organic acid or a salt thereof, and a remainder of water. The etchant composition may be configured to etch a metal layer including copper and titanium, to form a metal wire that may be included in a thin film transistor array panel of a display device.
Public/Granted literature
- US20140024206A1 ETCHANT COMPOSITION AND METHOD OF FORMING METAL WIRE AND THIN FILM TRANSISTOR ARRAY PANEL USING THE SAME Public/Granted day:2014-01-23
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