Invention Grant
US09045833B2 Etchant composition and method of forming metal wire and thin film transistor array panel using the same 有权
蚀刻剂组成和形成金属线和薄膜晶体管阵列面板的方法使用相同

Etchant composition and method of forming metal wire and thin film transistor array panel using the same
Abstract:
A etchant composition that includes, based on a total weight of the etchant composition, about 0.5 wt % to about 20 wt % of a persulfate, about 0.5 wt % to about 0.9 wt % of an ammonium fluoride, about 1 wt % to about 10 wt % of an inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 10.0 wt % of a sulfonic acid, about 5 wt % to about 10 wt % of an organic acid or a salt thereof, and a remainder of water. The etchant composition may be configured to etch a metal layer including copper and titanium, to form a metal wire that may be included in a thin film transistor array panel of a display device.
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