Invention Grant
- Patent Title: Measuring apparatus, measuring method, and program
- Patent Title (中): 测量装置,测量方法和程序
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Application No.: US13387653Application Date: 2010-07-28
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Publication No.: US09046355B2Publication Date: 2015-06-02
- Inventor: Shiki Takabayashi , Hiroshi Yoshikawa
- Applicant: Shiki Takabayashi , Hiroshi Yoshikawa
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Division
- Priority: JP2009-176525 20090729
- International Application: PCT/JP2010/004802 WO 20100728
- International Announcement: WO2011/013373 WO 20110203
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/30 ; G01B11/25 ; G06T7/00

Abstract:
A measuring apparatus includes a projection control unit configured to cause a projection unit to project, onto an object, a first light pattern with light and dark portions, a second light pattern, which is smaller in distance between the light and dark portions than that of the first light pattern and has a boundary position between the light and dark portions common to the first light pattern, and a third light pattern in which the light and dark portions of the second light pattern are reversed to each other, an acquisition unit configured to acquire a first captured image of the object onto which the first light pattern is projected, a second captured image of the object onto which the second light pattern is projected, and a third captured image of the object onto which the third light pattern is projected, and a calculation unit configured to calculate the boundary position between the light and dark portions of the first captured image based on the second and the third captured image to measure the position of the object.
Public/Granted literature
- US20120133954A1 MEASURING APPARATUS, MEASURING METHOD, AND PROGRAM Public/Granted day:2012-05-31
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