Invention Grant
- Patent Title: Micro-electro-mechanical-system device with oscillating assembly
- Patent Title (中): 具有摆动组件的微机电系统装置
-
Application No.: US13459270Application Date: 2012-04-30
-
Publication No.: US09046367B2Publication Date: 2015-06-02
- Inventor: Chung-Yuan Su , Chao-Ta Huang , Shih-Chieh Lin , Yu-Wen Hsu
- Applicant: Chung-Yuan Su , Chao-Ta Huang , Shih-Chieh Lin , Yu-Wen Hsu
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW100149887A 20111230
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5747

Abstract:
A micro-electro-mechanical-system (MEMS) device comprising two proof masses disposed in the first frame, such that the MEMS device with oscillating assemblies senses the angular velocity in the two axes, respectively. The MEMS device with oscillating assemblies further comprises a lever structure and two oscillating assemblies connecting at two opposite ends of the lever structure, such that the oscillating assemblies move in opposite directions synchronously. The MEMS device with oscillating assemblies further comprises a spring assembly connected between the proof mass and a movable electrode, restricting the proof mass to drive the movable electrode to only move in a specific direction.
Public/Granted literature
- US20130167635A1 MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH OSCILLATING ASSEMBLY Public/Granted day:2013-07-04
Information query