Invention Grant
- Patent Title: System for dual pressure sensing
- Patent Title (中): 双压感测系统
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Application No.: US13411681Application Date: 2012-03-05
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Publication No.: US09046427B2Publication Date: 2015-06-02
- Inventor: Muhammad A. Hawwa , Kamal Youcef-Toumi , Hussain Al-Qahtani
- Applicant: Muhammad A. Hawwa , Kamal Youcef-Toumi , Hussain Al-Qahtani
- Applicant Address: US MA Cambridge SA Dhahran
- Assignee: Massachusetts Institute of Technology,King Fahd University of Petroleum and Minerals
- Current Assignee: Massachusetts Institute of Technology,King Fahd University of Petroleum and Minerals
- Current Assignee Address: US MA Cambridge SA Dhahran
- Agency: MIT Technology Licensing Office
- Agent Sam Pasternack
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L7/04 ; G01L7/06 ; G01L7/08 ; G01L15/00 ; G01L27/00

Abstract:
Pressure sensor. The sensor includes a deformable diaphragm responsive to applied pressure and a rigid beam mounted to move as the diaphragm deforms. The rigid beam includes a mirrored surface for receiving light from and reflecting light into an optical fiber thereby forming a Fabry-Perot cavity to detect changes in the position of the rigid beam. The rigid beam further includes inter-digital fingers extending from the mirrored surface and moving with the rigid beam with respect to fixed inter-digital fingers to create a change in electrical charges in the fingers to detect changes in the position of the rigid beam thereby providing two measures of rigid beam displacement which are measures of pressure. In a preferred embodiment, the optical fiber is a single mode optical fiber.
Public/Granted literature
- US20120255363A1 SYSTEM FOR DUAL PRESSURE SENSING Public/Granted day:2012-10-11
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