Invention Grant
US09046547B2 Accelerometer having multiple feedback systems operating on a given proof mass
有权
加速度计具有在给定的质量块上操作的多个反馈系统
- Patent Title: Accelerometer having multiple feedback systems operating on a given proof mass
- Patent Title (中): 加速度计具有在给定的质量块上操作的多个反馈系统
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Application No.: US13584014Application Date: 2012-08-13
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Publication No.: US09046547B2Publication Date: 2015-06-02
- Inventor: Knut David Westberg , Mats Lennart Carlsson , Erik Andreas Dreyfert , Milena Anguelova
- Applicant: Knut David Westberg , Mats Lennart Carlsson , Erik Andreas Dreyfert , Milena Anguelova
- Applicant Address: NO Oslo
- Assignee: PGS Geophysical AS
- Current Assignee: PGS Geophysical AS
- Current Assignee Address: NO Oslo
- Main IPC: G01P15/13
- IPC: G01P15/13 ; G01P15/125

Abstract:
Certain disclosed accelerometer sensors and methods employ a proof mass that is acted upon by multiple feedback paths. One illustrative sensor embodiment includes an electrode arrangement proximate to a proof mass, the electrode arrangement providing multiple electrostatic force centroids on the proof mass. The sensor embodiment further includes multiple feedback paths, each feedback path independently controlling an electrostatic force for a respective centroid, and an output unit that converts signals from the multiple feedback paths into an acceleration-responsive output signal. An illustrative method embodiment derives multiple feedback signals from at least one displacement signal, applies the multiple feedback signals to an arrangement of electrodes that capacitively couple the proof mass to a substrate, and converts the multiple feedback signals into an acceleration signal.
Public/Granted literature
- US20140041452A1 ACCELEROMETER HAVING MULTIPLE FEEDBACK SYSTEMS OPERATING ON A GIVEN PROOF MASS Public/Granted day:2014-02-13
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