Invention Grant
US09046779B2 Method of fabricating display device using maskless exposure apparatus and display device
有权
使用无掩模曝光装置和显示装置制造显示装置的方法
- Patent Title: Method of fabricating display device using maskless exposure apparatus and display device
- Patent Title (中): 使用无掩模曝光装置和显示装置制造显示装置的方法
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Application No.: US13861039Application Date: 2013-04-11
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Publication No.: US09046779B2Publication Date: 2015-06-02
- Inventor: Sang Hyun Yun , Cha-Dong Kim , Jung-In Park , Jae Hyuk Chang , Hi Kuk Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2012-0155109 20121227
- Main IPC: B32B3/00
- IPC: B32B3/00 ; G03F7/20 ; G03F7/00 ; G02F1/1335 ; G02F1/1339

Abstract:
The present invention relates to a method of fabricating a display device using a maskless exposure apparatus, and the display device, and more particularly, to a method of fabricating a display device by using a maskless exposure apparatus, which is capable of preventing a stain from being viewed, and the display device. An exemplary embodiment of the present invention provides a method of fabricating a display device, including: forming a first exposure region on a substrate by performing exposure while scanning the substrate with a first exposure head irradiating an exposure beam according to pattern information of a first pattern in a scanning direction; and forming a second exposure region adjacent to the first exposure region on the substrate by performing exposure while scanning the substrate with a second exposure head irradiating an exposure beam according to the pattern information of the first pattern in the scanning direction; in which an exposure boundary region between the first exposure region and the second exposure region is extended in the scanning direction, and the exposure boundary region overlaps a light blocking region.
Public/Granted literature
- US20140186595A1 METHOD OF FABRICATING DISPLAY DEVICE USING MASKLESS EXPOSURE APPARATUS AND DISPLAY DEVICE Public/Granted day:2014-07-03
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